The photoresist pattern for the lift-off process to form the sensor element was patterned using a negative photoresist (Zeon corporation, ZPN-1150). (c) A metal thin film was deposited by sputtering to produce the heater and the temperature compensation sensor.

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The photoresist pattern for the lift-off process to form the sensor element was patterned using a negative photoresist (Zeon corporation, ZPN-1150). (c) A metal thin film was deposited by sputtering to produce the heater and the temperature compensation sensor.

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